JPH0710244Y2 - 光学式形状測定装置 - Google Patents

光学式形状測定装置

Info

Publication number
JPH0710244Y2
JPH0710244Y2 JP1880889U JP1880889U JPH0710244Y2 JP H0710244 Y2 JPH0710244 Y2 JP H0710244Y2 JP 1880889 U JP1880889 U JP 1880889U JP 1880889 U JP1880889 U JP 1880889U JP H0710244 Y2 JPH0710244 Y2 JP H0710244Y2
Authority
JP
Japan
Prior art keywords
focus error
defocus
light
measured
optical system
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1880889U
Other languages
English (en)
Japanese (ja)
Other versions
JPH02110803U (en]
Inventor
健太 御厨
智昭 南光
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Yokogawa Electric Corp
Original Assignee
Yokogawa Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Yokogawa Electric Corp filed Critical Yokogawa Electric Corp
Priority to JP1880889U priority Critical patent/JPH0710244Y2/ja
Publication of JPH02110803U publication Critical patent/JPH02110803U/ja
Application granted granted Critical
Publication of JPH0710244Y2 publication Critical patent/JPH0710244Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)
JP1880889U 1989-02-20 1989-02-20 光学式形状測定装置 Expired - Lifetime JPH0710244Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1880889U JPH0710244Y2 (ja) 1989-02-20 1989-02-20 光学式形状測定装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1880889U JPH0710244Y2 (ja) 1989-02-20 1989-02-20 光学式形状測定装置

Publications (2)

Publication Number Publication Date
JPH02110803U JPH02110803U (en]) 1990-09-05
JPH0710244Y2 true JPH0710244Y2 (ja) 1995-03-08

Family

ID=31233778

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1880889U Expired - Lifetime JPH0710244Y2 (ja) 1989-02-20 1989-02-20 光学式形状測定装置

Country Status (1)

Country Link
JP (1) JPH0710244Y2 (en])

Also Published As

Publication number Publication date
JPH02110803U (en]) 1990-09-05

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